Wikidata

(Q121833560)

English

Sputtering method and sputtering apparatus

US patent 11404255

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Statements

title
Sputtering method and sputtering apparatus (English)
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owned by
Tokyo Electron
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author name string
Kazunaga Ono (Yamanashi)
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Atsushi Gomi (Yamanashi)
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Tatsuo Hatano (Yamanashi)
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Yasuhiro Otagiri (Yamanashi)
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Tomoyuki Fujihara (Yamanashi)
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Yuuki Motomura (Yamanashi)
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significant event
filing
point in time
9 September 2020
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consent
point in time
2 August 2022
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Identifiers

patent number
US11404255
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