(Q121889926)
Statements
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices (English)
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Praket P. Jha (San Jose, CA)
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Allen Ko (Fremont, CA)
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Xinhai Han (Santa Clara, CA)
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Thomas Jongwan Kwon (Dublin, CA)
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Bok Hoen Kim (San Jose, CA)
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Byung Ho Kil (Gangdong-gu)
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Ryeun Kim (Wonju-Si)
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Sang Hyuk Kim (Gyeonggi)
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