(Q123327991)

English

Substrate treatment apparatus

US patent 11465167

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United States patent

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Substrate treatment apparatus (English)

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United States of America

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SCREEN Holdings

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author name string

Hiroshi Abe (Kyoto)

1

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Manabu Okutani (Kyoto)

2

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Takashi Ota (Kyoto)

3

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Naohiko Yoshihara (Kyoto)

4

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significant event

8 September 2020

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11 October 2022

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