Wikidata

(Q43567747)

English

Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with Ultrathin (<2 nm) Polymer Coating.

scientific article published on 19 July 2017

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title
Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with Ultrathin (<2 nm) Polymer Coating (English)
1 reference
stated in
Europe PubMed Central
PubMed ID
28723069
reference URL
https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:28723069%20AND%20SRC:MED&resulttype=core&format=json
retrieved
25 March 2020

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