Wikidata

(Q62570409)

English

High quality 4H‐SiC epitaxial layers grown by chemical vapor deposition

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title
High quality 4H‐SiC epitaxial layers grown by chemical vapor deposition (English)
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author
Erik Janzén
series ordinal
7
object named as
E. Janzén
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Anne Henry
series ordinal
2
object named as
A. Henry
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Olof Kordina
series ordinal
1
object named as
O. Kordina
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author name string
J. P. Bergman
series ordinal
3
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W. M. Chen
series ordinal
5
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C. Hallin
series ordinal
6
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publication date
13 March 1995
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volume
66
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issue
11
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page(s)
1373-1375
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Identifiers

DOI
10.1063/1.113205
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