(Q119705168)
Statements
Semiconductor device having a contact plug with an air gap spacer (English)
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Su-Hao Liu (Jhongpu Township)
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Kuo-Ju Chen (Taichung)
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Kai-Hsuan Lee (Hsinchu)
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I-Hsieh Wong (Hsinchu)
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Cheng-Yu Yang (Xihu Township)
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Liang-Yin Chen (Hsinchu)
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Huicheng Chang (Tainan)
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Yee-Chia Yeo (Hsinchu)
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Syun-Ming Jang (Hsinchu)
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Meng-Han Chou (Hsinchu)
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