Wikidata

(Q121831405)

English

Method and system for prevention of metal contamination by using a self-assembled monolayer coating

US patent 11460775

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Statements

title
Method and system for prevention of metal contamination by using a self-assembled monolayer coating (English)
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owned by
Tokyo Electron
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author name string
Hoyoung Kang (Guilderland, NY)
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Anton J. Devilliers (Clifton Park, NY)
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Corey Lemley (Troy, NY)
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significant event
filing
point in time
4 September 2019
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consent
point in time
4 October 2022
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Identifiers

patent number
US11460775
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