Wikidata

(Q121889819)

English

Multizone flow gasbox for processing chamber

US patent 11367594

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title
Multizone flow gasbox for processing chamber (English)
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author name string
Mingle Tong (San Jose, CA)
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Li-Qun Xia (Cupertino, CA)
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Daemian Raj Benjamin Raj (Fremont, CA)
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significant event
filing
point in time
27 November 2019
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consent
point in time
21 June 2022
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Identifiers

patent number
US11367594
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