(Q775523)

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130 nm lithography process

semiconductor manufacturing processes with a 130 nm MOSFET technology node

130nm
130 nm
0.13μm
0.13 μm
0.13-micrometre
0.13-micron

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photolithography

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follows

150 nm lithography process

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followed by

110 nm lithography process

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manufacturer

TSMC

1 reference

reference URL

http://www.tsmc.com/english/dedicatedFoundry/technology/0.13um.htm

23 July 2016

4 references

http://marcomauto.globalfoundries.com/acton/attachment/8470/f-0017/1/-/-/-/-/PB-RF-CMOS-130nm-28nm-Solutions.pdf

23 July 2016

http://marcomauto.globalfoundries.com/acton/attachment/8470/f-0020/1/-/-/-/-/PB-55LPx-and-30BCDlite-Embedded-Memory.pdf

23 July 2016

http://www.globalfoundries.com/technology-solutions/mainstream-technology/embedded-memory

23 July 2016

http://marcomauto.globalfoundries.com/acton/attachment/8470/f-0026/1/-/-/-/-/PB-130-180nm-BCDlite.pdf

23 July 2016

International Technology Roadmap for Semiconductors

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1 reference

28 October 2013

(Q775523)

130 nm lithography process

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