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Ion beam-induced anisotropic plastic deformation of silicon microstructures

scientific article published on 3 May 2004

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Ion beam-induced anisotropic plastic deformation of silicon microstructures (English)

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T. van Dillen

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1

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M. J. A. de Dood

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2

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J. J. Penninkhof

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3

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A. Polman

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4

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S. Roorda

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5

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A. M. Vredenberg

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6

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publication date

3 May 2004

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published in

Applied Physics Letters

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volume

84

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issue

18

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page(s)

3591-3593

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cites work

Dimensional changes of metallic glasses during bombardment with fast heavy ions

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Density of amorphous Si

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Viscoelastic model for the plastic flow of amorphous solids under energetic ion bombardment.

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https://api.crossref.org/v1/works/10.1063/1.1737480

(Q100721926)

Ion beam-induced anisotropic plastic deformation of silicon microstructures

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