Wikidata

(Q107365021)

English

Transient enhanced diffusion of aluminum in SiC during high temperature ion implantation

scientific article

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title
Transient enhanced diffusion of aluminum in SiC during high temperature ion implantation (English)
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author name string
I. O. Usov
series ordinal
1
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A. A. Suvorova
series ordinal
2
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V. V. Sokolov
series ordinal
3
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Y. A. Kudryavtsev
series ordinal
4
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A. V. Suvorov
series ordinal
5
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publication date
December 1999
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volume
86
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issue
11
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page(s)
6039-6042
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Identifiers

DOI
10.1063/1.371651
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