Wikidata

(Q107365039)

English

HREM study of ion implantation in 6H-SiC at high temperatures

scientific article

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title
HREM study of ion implantation in 6H-SiC at high temperatures (English)
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author name string
O. I. Lebedev
series ordinal
1
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G. Van Tendeloo
series ordinal
2
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A. A. Suvorova
series ordinal
3
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I. O. Usov
series ordinal
4
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A. V. Suvorov
series ordinal
5
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publication date
1 January 1997
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volume
46
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issue
4
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page(s)
271-279
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