Wikidata

(Q27724301)

English

Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B

journal

  • J Vac Sci Technol B Nanotechnol Microelectron
  • Journal of vacuum science and technology. B, Nanotechnology & microelectronics
In more languages

Statements

title
Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B (English)
0 references
Journal of vacuum science and technology. B, Nanotechnology & microelectronics (English)
1 reference
stated in
ISSN Portal
ISSN
2166-2746

Identifiers

ISSN
2166-2746
subject named as
Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print)
distribution format
printed matter
0 references
2166-2754
subject named as
Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Online)
distribution format
online publication
0 references
ISSN-L
2166-2746
0 references
Crossref journal ID
217405
0 references
HAL journal ID
112565
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JUFO ID
62086
0 references
NLM Unique ID
101585681
0 references
OpenAlex ID
V4210235835
0 references
V2764512725
0 references
V179886003
0 references
Scilit journal ID
49942
0 references
 
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