(Q28272867)

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Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field

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Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field (English)
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He Gao
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Hua Tan
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Wei Zhang
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Keith Morton
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Stephen Y Chou
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November 2006
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6
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11
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2438-41
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