(Q29031406)

English

Imprint Lithography with 25-Nanometer Resolution

scientific article (publication date: 5 April 1996)

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scholarly article

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title

Imprint Lithography with 25-Nanometer Resolution (English)

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https://doi.org/10.1126%2FSCIENCE.272.5258.85

retrieved

26 March 2017

author name string

S. Y. Chou

series ordinal

1

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https://doi.org/10.1126%2FSCIENCE.272.5258.85

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26 March 2017

P. R. Krauss

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2

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https://doi.org/10.1126%2FSCIENCE.272.5258.85

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26 March 2017

P. J. Renstrom

series ordinal

3

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https://doi.org/10.1126%2FSCIENCE.272.5258.85

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26 March 2017

language of work or name

English

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publication date

5 April 1996

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reference URL

https://doi.org/10.1126%2FSCIENCE.272.5258.85

26 March 2017

1 reference

DOI.org query endpoint

reference URL

https://doi.org/10.1126%2FSCIENCE.272.5258.85

retrieved

26 March 2017

volume

272

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https://doi.org/10.1126%2FSCIENCE.272.5258.85

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26 March 2017

issue

5258

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https://doi.org/10.1126%2FSCIENCE.272.5258.85

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26 March 2017

page(s)

85-87

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https://doi.org/10.1126%2FSCIENCE.272.5258.85

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26 March 2017

Identifiers

DOI

10.1126/SCIENCE.272.5258.85

2 references

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reference URL

https://doi.org/10.1126%2FSCIENCE.272.5258.85

retrieved

26 March 2017

stated in

Consolidated OpenCitations Corpus – April 2017

OpenCitations bibliographic resource ID

1474970

OpenCitations bibliographic resource ID

1474970

1 reference

stated in

Consolidated OpenCitations Corpus – April 2017

OpenCitations bibliographic resource ID

1474970

ResearchGate publication ID

253284927

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(Q29031406)

Imprint Lithography with 25-Nanometer Resolution

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