Wikidata

(Q29036099)

English

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

scientific article (publication date: July 1974)

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title
Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings (English)
1 reference
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DOI.org query endpoint
reference URL
https://doi.org/10.1116%2F1.1312732
retrieved
27 March 2017

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