(Q29038257)

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Submicroscopic pattern replication with visible light

scientific article (publication date: November 1981)

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Submicroscopic pattern replication with visible light (English)

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https://doi.org/10.1116%2F1.571227

27 March 2017

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U. Ch. Fischer

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27 March 2017

H. P. Zingsheim

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2

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publication date

November 1981

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27 March 2017

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Journal of Vacuum Science and Technology

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volume

19

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issue

4

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881-885

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10.1116/1.571227

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(Q29038257)

Submicroscopic pattern replication with visible light

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