(Q29043658)

English

Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena

journal

Journal of vacuum science & technology. B, Microelectronics processing and phenomena

In more languages

edit

Statements

instance of

scientific journal

0 references

title

Journal of vacuum science & technology. B, Microelectronics processing and phenomena (English)

1 reference

1 reference

https://www.elsevier.com/__data/assets/excel_doc/0015/91122/ext_list_April_2018_2017_Metrics.xlsx

country of origin

United States of America

1 reference

language of work or name

1 reference

http://scitation.aip.org/jvst/

1 reference

indexed in bibliographic review

Scopus

0 references

Identifiers

ISSN

0734-211X

subject named as

Journal of vacuum science & technology. B, Microelectronics processing and phenomena

0 references

Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)

1 reference

23 March 2018

https://api.crossref.org/journals/2327-9877

0 references

1 reference

National Collective Archive of Periodicals

retrieved

4 April 2020

2981625

1 reference

stated in

National Collective Archive of Periodicals

retrieved

4 April 2020

Crossref journal ID

5527

0 references

0 references

0 references

0 references

0 references

(Q29043658)

Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena

Statements

Identifiers

Sitelinks

Wikipedia(0 entries)

Wikibooks(0 entries)

Wikinews(0 entries)

Wikiquote(0 entries)

Wikisource(0 entries)

Wikiversity(0 entries)

Wikivoyage(0 entries)

Wiktionary(0 entries)

Multilingual sites(0 entries)