(Q30047405)

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Impact of the vertical SOI 'DELTA' structure on planar device technology

scientific article (publication date: June 1991)

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Impact of the vertical SOI 'DELTA' structure on planar device technology (English)

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D. Hisamoto

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1

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T. Kaga

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2

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E. Takeda

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3

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June 1991

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IEEE Transactions on Electron Devices

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38

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6

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1419-1424

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10.1109/16.81634

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81634

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10.1109/16.81634

(Q30047405)

Impact of the vertical SOI 'DELTA' structure on planar device technology

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