(Q33185487)

23 July 2017

title

Theoretical analysis of the atomic force microscopy characterization of columnar thin films (English)

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23 July 2017

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Petr Klapetek

1

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23 July 2017

Ivan Ohlídal

series ordinal

2

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23 July 2017

publication date

1 January 2003

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23 July 2017

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23 July 2017

volume

94

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23 July 2017

issue

1

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23 July 2017

page(s)

19-29

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Topographic measurements of supersmooth dielectric films made with a mechanical profiler and a scanning force microscope

23 July 2017

cites work

1 reference

https://api.crossref.org/works/10.1016%2FS0304-3991%2802%2900159-6

7 January 2021

Thickness dependence of the optical properties of sputter deposited Ti oxide films

1 reference

https://api.crossref.org/works/10.1016%2FS0304-3991%2802%2900159-6

7 January 2021

Perpendicular-incidence photometric ellipsometry of biaxial anisotropic thin films

1 reference

https://api.crossref.org/works/10.1016%2FS0304-3991%2802%2900159-6

7 January 2021

Refractive indices of TiO(2) films produced by reactive evaporation of various titanium-oxygen phases

1 reference

https://api.crossref.org/works/10.1016%2FS0304-3991%2802%2900159-6

7 January 2021

Algorithms for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation

1 reference

https://api.crossref.org/works/10.1016%2FS0304-3991%2802%2900159-6

7 January 2021

10.1016/S0304-3991(02)00159-6

Identifiers

DOI

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23 July 2017

1 reference