(Q33306772)

25 July 2017

title

3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP. (English)

1 reference

25 July 2017

0 references

Moore JS

1

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25 July 2017

Jones KS

series ordinal

2

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Kennel H

series ordinal

3

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Corcoran S

series ordinal

4

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25 July 2017

publication date

30 August 2007

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25 July 2017

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25 July 2017

volume

108

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issue

6

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25 July 2017

page(s)

536-539

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First data from a commercial local electrode atom probe (LEAP).

25 July 2017

cites work

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2007.08.008

Crossref

reference URL

Strategies for fabricating atom probe specimens with a dual beam FIB

7 January 2021

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2007.08.008

Crossref

reference URL

In situ site-specific specimen preparation for atom probe tomography

7 January 2021

1 reference

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2007.08.008

Crossref

reference URL

10.1016/J.ULTRAMIC.2007.08.008

7 January 2021

Identifiers

DOI

1 reference

25 July 2017

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