(Q33361849)
Statements
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Observation of three-dimensional elemental distributions of a Si device using a 360 degrees -tilt FIB and the cold field-emission STEM system (English)
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Toshie Yaguchi
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Mitsuru Konno
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Takeo Kamino
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Masashi Watanabe
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25 June 2008
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108
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12
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1603-1615
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Identifiers
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