(Q36389498)

https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:16463490%20AND%20SRC:MED&resulttype=core&format=json

16 January 2020

title

Capacitive micromachined ultrasonic transducers: fabrication technology (English)

1 reference

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16 January 2020

4

1 reference

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16 January 2020

author name string

Arif Sanli Ergun

1

1 reference

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16 January 2020

Yongli Huang

2

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16 January 2020

Xuefeng Zhuang

3

1 reference

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16 January 2020

Goksen G Yaralioglu

5

1 reference

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16 January 2020

Butrus T Khuri-Yakub

6

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16 January 2020

publication date

1 December 2005

1 reference

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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

16 January 2020

published in

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16 January 2020

volume

52

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16 January 2020

issue

12

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16 January 2020

page(s)

2242-2258

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https://www.ebi.ac.uk/europepmc/webservices/rest/search?query=EXT_ID:16463490%20AND%20SRC:MED&resulttype=core&format=json

10.1109/TUFFC.2005.1563267

16 January 2020

Identifiers

DOI

1 reference

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16 January 2020

1 reference