(Q37083929)
Statements
1 reference
Porous low dielectric constant materials for microelectronics (English)
1 reference
Mikhail R Baklanov
1 reference
Karen Maex
1 reference
1 January 2006
1 reference
1 reference
364
1 reference
1838
1 reference
201-215
1 reference
Identifiers
1 reference
1 reference