(Q37704802)
Statements
1 reference
Single-chip mechatronic microsystem for surface imaging and force response studies (English)
1 reference
Sadik Hafizovic
1 reference
Diego Barrettino
1 reference
Tormod Volden
1 reference
Jan Sedivy
1 reference
Kay-Uwe Kirstein
1 reference
Oliver Brand
1 reference
Andreas Hierlemann
1 reference
29 November 2004
1 reference
17011-17015
1 reference
1 reference
1 reference
1 reference
Identifiers
1 reference
1 reference
1 reference