(Q42014062)
Statements
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An annular mechanical temperature compensation structure for gas-sealed capacitive pressure sensor (English)
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Xiuchun Hao
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Yonggang Jiang
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Hidekuni Takao
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Kazusuke Maenaka
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Kohei Higuchi
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11 June 2012
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8026-8038
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11 June 2012
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Identifiers
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