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(Q46202194)

English

Filtration of sub-100 nm particles using a bulk-micromachined, direct-bonded silicon filter

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title
Filtration of sub-100 nm particles using a bulk-micromachined, direct-bonded silicon filter (English)
1 reference
stated in
Europe PubMed Central
PubMed publication ID
16281111
retrieved
20 December 2017
reference URL
http://europepmc.org/abstract/MED/16281111

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