(Q46880974)
Statements
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Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems (English)
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Mogensen KB
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Friis P
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Hübner J
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Petersen N
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Jørgensen AM
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Telleman P
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Kutter JP
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1 May 2001
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26
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10
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716-718
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Identifiers
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