(Q47372236)

English

Atomic layer deposition of transition metals

scientific article published on October 26, 2003

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scholarly article

1 reference

Europe PubMed Central

PubMed publication ID

15 January 2018

http://europepmc.org/abstract/MED/14578877

Atomic layer deposition of transition metals (English)

1 reference

10.1038/NMAT1000

https://api.crossref.org/works/10.1038/NMAT1000

25 March 2024

transition metal

1 reference

based on heuristic

inferred from title

synthetic membrane

1 reference

Europe PubMed Central

PubMed publication ID

https://www.ebi.ac.uk/europepmc/webservices/rest/search?resulttype=core&format=json&query=SRC%3AMED%20AND%20EXT_ID%3A14578877

25 March 2024

mechanical engineering

1 reference

10.1038/NMAT1000

https://api.crossref.org/works/10.1038/NMAT1000

25 March 2024

author name string

Antti Rahtu

2

1 reference

Europe PubMed Central

PubMed publication ID

15 January 2018

http://europepmc.org/abstract/MED/14578877

Booyong S. Lim

1

1 reference

Europe PubMed Central

PubMed publication ID

https://www.ebi.ac.uk/europepmc/webservices/rest/search?resulttype=core&format=json&query=SRC%3AMED%20AND%20EXT_ID%3A14578877

25 March 2024

Roy G. Gordon

3

1 reference

Europe PubMed Central

PubMed publication ID

https://www.ebi.ac.uk/europepmc/webservices/rest/search?resulttype=core&format=json&query=SRC%3AMED%20AND%20EXT_ID%3A14578877

25 March 2024

language of work or name

0 references

publication date

26 October 2003

1 reference

Europe PubMed Central

PubMed publication ID

15 January 2018

http://europepmc.org/abstract/MED/14578877

full work available at URL

https://www.nature.com/articles/nmat1000.pdf

Portable Document Format

1 reference

10.1038/NMAT1000

https://api.crossref.org/works/10.1038/NMAT1000

25 March 2024

https://www.nature.com/articles/nmat1000

1 reference

10.1038/NMAT1000

https://api.crossref.org/works/10.1038/NMAT1000

25 March 2024

Nature Materials

1 reference

Europe PubMed Central

PubMed publication ID

15 January 2018

http://europepmc.org/abstract/MED/14578877

2

1 reference

Europe PubMed Central

PubMed publication ID

15 January 2018

http://europepmc.org/abstract/MED/14578877

11

1 reference

Europe PubMed Central

PubMed publication ID

15 January 2018

http://europepmc.org/abstract/MED/14578877

749-754

1 reference

Europe PubMed Central

PubMed publication ID

15 January 2018

http://europepmc.org/abstract/MED/14578877

Alternative dielectrics to silicon dioxide for memory and logic devices

1 reference

https://api.crossref.org/works/10.1038%2FNMAT1000

21 January 2018

Rapid vapor deposition of highly conformal silica nanolaminates

1 reference

https://api.crossref.org/works/10.1038%2FNMAT1000

21 January 2018

Atomic Layer Deposition of Platinum Thin Films

1 reference

https://api.crossref.org/works/10.1038%2FNMAT1000

21 January 2018

Synthesis and characterization of volatile, thermally stable, reactive transition metal amidinates.

1 reference

https://api.crossref.org/works/10.1038%2FNMAT1000

21 January 2018

Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition

1 reference

https://api.crossref.org/works/10.1038%2FNMAT1000

21 January 2018

Identifiers

10.1038/NMAT1000

1 reference

Europe PubMed Central

PubMed publication ID

15 January 2018

http://europepmc.org/abstract/MED/14578877

Dimensions Publication ID

0 references

PubMed publication ID

1 reference

Europe PubMed Central

PubMed publication ID

15 January 2018

http://europepmc.org/abstract/MED/14578877

ResearchGate publication ID

0 references

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