Wikidata

(Q47957263)

English

Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition

scientific article published on 4 January 2008

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Statements

title
Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition (English)
1 reference
stated in
Europe PubMed Central
PubMed publication ID
21817499
retrieved
7 February 2018
reference URL
http://europepmc.org/abstract/MED/21817499
main subject
aluminium
0 references
nanostructure
0 references

Identifiers

 
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