Wikidata

(Q51327200)

English

Diffusion of hydrosilanes from the control layer to the vinylsilane-rich flow membrane during the fabrication of microfluidic chips.

scientific article published in November 2005

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title
Diffusion of hydrosilanes from the control layer to the vinylsilane-rich flow membrane during the fabrication of microfluidic chips. (English)
1 reference
stated in
Europe PubMed Central
PubMed publication ID
16262310
retrieved
3 April 2018
reference URL
http://europepmc.org/abstract/MED/16262310
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