Wikidata

(Q51574592)

English

Effect of exposure dose on the replication fidelity and profile of very high aspect ratio microchannels in SU-8.

scientific article published in November 2004

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title
Effect of exposure dose on the replication fidelity and profile of very high aspect ratio microchannels in SU-8. (English)
1 reference
stated in
Europe PubMed Central
PubMed publication ID
15570379
retrieved
7 April 2018
reference URL
http://europepmc.org/abstract/MED/15570379

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