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Refractive sapphire microlenses fabricated by chlorine-based inductively coupled plasma etching.

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18360401

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Refractive sapphire microlenses fabricated by chlorine-based inductively coupled plasma etching. (English)

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Park SH

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Jeon H

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Sung YJ

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Yeom GY

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1 August 2001

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Applied Optics

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40

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22

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3698-3702

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DOI

10.1364/AO.40.003698

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18360401

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ADS bibcode

2001ApOpt..40.3698P

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PubMed publication ID

18360401

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18360401

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(Q53545055)

Refractive sapphire microlenses fabricated by chlorine-based inductively coupled plasma etching.

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