Wikidata

(Q54157292)

English

Etch rates for micromachining processing

article published in 1996

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Statements

title
Etch rates for micromachining processing (English)
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author name string
K.R. Williams
series ordinal
1
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R.S. Muller
series ordinal
2
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publication date
1996
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volume
5
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issue
4
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page(s)
256-269
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Identifiers

DOI
10.1109/84.546406
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