Wikidata

(Q55897080)

English

Surface micromachining for microelectromechanical systems

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Statements

title
Surface micromachining for microelectromechanical systems (English)
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author name string
J.M. Bustillo
series ordinal
1
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R.T. Howe
series ordinal
2
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R.S. Muller
series ordinal
3
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publication date
1998
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volume
86
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issue
8
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page(s)
1552-1574
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Identifiers

DOI
10.1109/5.704260
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