(Q56408241)

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Polysilicon as a material for microsensor applications

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scholarly article

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Polysilicon as a material for microsensor applications (English)

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author name string

E. Obermeier

1

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P. Kopystynski

2

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publication date

January 1992

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Sensors and Actuators A: Physical

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30

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1-2

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149-155

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Identifiers

10.1016/0924-4247(92)80210-T

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