Wikidata

(Q56425135)

English

Mechanisms of equilibrium and nonequilibrium diffusion of dopants in silicon

scientific article published in Physical Review Letters

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Statements

title
Mechanisms of equilibrium and nonequilibrium diffusion of dopants in silicon (English)
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author name string
C. S. Nichols
series ordinal
1
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C. G. Van de Walle
series ordinal
2
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S. T. Pantelides
series ordinal
3
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publication date
27 February 1989
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volume
62
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issue
9
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page(s)
1049-1052
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Identifiers

 
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