Wikidata

(Q56483228)

English

Investigation of film‐thickness determination by oscillating quartz resonators with large mass load

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Statements

title
Investigation of film‐thickness determination by oscillating quartz resonators with large mass load (English)
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author name string
Chih‐Shun Lu
series ordinal
1
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Owen Lewis
series ordinal
2
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publication date
November 1972
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volume
43
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issue
11
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page(s)
4385-4390
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Identifiers

DOI
10.1063/1.1660931
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