Wikidata

(Q56555746)

English

Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source

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Statements

title
Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source (English)
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author name string
Jaeyoung Park
series ordinal
1
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I. Henins
series ordinal
2
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H. W. Herrmann
series ordinal
3
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G. S. Selwyn
series ordinal
4
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R. F. Hicks
series ordinal
5
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publication date
January 2001
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volume
89
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issue
1
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page(s)
20-28
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Identifiers

DOI
10.1063/1.1323753
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