(Q56636685)

English

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

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Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process) (English)

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synchrotron radiation

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author name string

E.W. Becker

series ordinal

1

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W. Ehrfeld

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2

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P. Hagmann

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3

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A. Maner

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4

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D. Münchmeyer

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5

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publication date

May 1986

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published in

Microelectronic Engineering

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volume

4

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issue

1

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page(s)

35-56

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describes a project that uses

synchrotron radiation

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Identifiers

DOI

10.1016/0167-9317(86)90004-3

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(Q56636685)

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

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