Wikidata

(Q56639746)

English

Sharpened electron beam deposited tips for high resolution atomic force microscope lithography and imaging

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Statements

title
Sharpened electron beam deposited tips for high resolution atomic force microscope lithography and imaging (English)
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author name string
M. Wendel
series ordinal
1
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H. Lorenz
series ordinal
2
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J. P. Kotthaus
series ordinal
3
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publication date
18 December 1995
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volume
67
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issue
25
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page(s)
3732-3734
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Identifiers

DOI
10.1063/1.115365
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