Wikidata

(Q56673767)

English

Ultrahigh resolution of calixarene negative resist in electron beam lithography

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Statements

title
Ultrahigh resolution of calixarene negative resist in electron beam lithography (English)
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author name string
J. Fujita
series ordinal
1
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Y. Ohnishi
series ordinal
2
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Y. Ochiai
series ordinal
3
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S. Matsui
series ordinal
4
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publication date
26 February 1996
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volume
68
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issue
9
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page(s)
1297-1299
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Identifiers

DOI
10.1063/1.115958
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