(Q57340640)

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Initiated and Oxidative Chemical Vapor Deposition of Polymeric Thin Films: iCVD and oCVD

article by Wyatt E. Tenhaeff & Karen K. Gleason published 11 April 2008 in Advanced Functional Materials

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Initiated and Oxidative Chemical Vapor Deposition of Polymeric Thin Films: iCVD and oCVD (English)
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Wyatt E. Tenhaeff
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Karen K. Gleason
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11 April 2008
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18
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7
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979-992
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