(Q57433361)

English

Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition

article

In more languages
default for all languages
No label defined

No description defined

Statements

Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition (English)
0 references
Bo Gong
0 references
Gregory N. Parsons
0 references
2012
0 references
22
0 references
31
0 references
15672
0 references

Identifiers

0 references
 
edit
    edit
      edit
        edit
          edit
            edit
              edit
                edit
                  edit