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Comparative studies of optical & elastic properties of ZrO2 thin films prepared under normal and oblique incidence deposition geometries
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title
Comparative studies of optical & elastic properties of ZrO2 thin films prepared under normal and oblique incidence deposition geometries
(English)
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main subject
thin film
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author name string
P. Sarkar
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1
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R. B. Tokas
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2
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S. Jena
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3
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S. Thakur
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4
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N. K. Sahoo
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5
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publication date
2014
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DOI
10.1063/1.4872849
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