Wikidata

(Q58745617)

English

Collapse of microchannels during anodic bonding: Theory and experiments

article published in 2004

In more languages

Statements

title
Collapse of microchannels during anodic bonding: Theory and experiments (English)
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author name string
Wen-Pin Shih
series ordinal
1
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Chung-Yuen Hui
series ordinal
2
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Norman C. Tien
series ordinal
3
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publication date
March 2004
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volume
95
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issue
5
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page(s)
2800-2808
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Identifiers

DOI
10.1063/1.1644898
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