(Q58800240)

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Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices

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scholarly article

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Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices (English)

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author name string

Bharat Bhushan

1

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publication date

March 2007

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Microelectronic Engineering

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84

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3

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387-412

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Identifiers

10.1016/J.MEE.2006.10.059

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