(Q58800411)

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Scanning capacitance microscopy for thin film measurements

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scholarly article

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Scanning capacitance microscopy for thin film measurements (English)

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author name string

D T Lee

1

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J P Pelz

2

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Bharat Bhushan

3

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publication date

16 February 2006

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17

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5

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1484-1491

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Identifiers

10.1088/0957-4484/17/5/054

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