(Q58800486)

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AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS

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AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS (English)

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Bharat Bhushan

1

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Toshi Kasai

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2

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Gerit Kulik

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3

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Laura Barbieri

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4

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Patrik Hoffmann

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5

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publication date

November 2005

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published in

Ultramicroscopy

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volume

105

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issue

1-4

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page(s)

176-188

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cites work

Formation and Structure of Self-Assembled Monolayers

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https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.06.034

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7 January 2021

Investigation of nanotribological properties of self-assembled monolayers with alkyl and biphenyl spacer chains (invited).

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https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.06.034

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7 January 2021

Atomic-Scale Friction Measurements Using Friction Force Microscopy: Part I—General Principles and New Measurement Techniques

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https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.06.034

retrieved

7 January 2021

Nanotribological properties and mechanisms of alkylthiol and biphenyl thiol self-assembled monolayers studied by AFM

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https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.06.034

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7 January 2021

Microtribological Characterization of Self-Assembled and Langmuir-Blodgett Monolayers by Atomic and Friction Force Microscopy

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https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.06.034

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7 January 2021

Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects

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reference URL

https://api.crossref.org/works/10.1016%2FJ.ULTRAMIC.2005.06.034

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7 January 2021

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10.1016/J.ULTRAMIC.2005.06.034

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(Q58800486)

AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS

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