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(Q58801382)

English

Scanning and transmission electron microscopies of single-crystal silicon microworn/machined using atomic force microscopy

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title
Scanning and transmission electron microscopies of single-crystal silicon microworn/machined using atomic force microscopy (English)
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author name string
Vilas N. Koinkar
series ordinal
1
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Bharat Bhushan
series ordinal
2
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publication date
December 1997
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volume
12
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issue
12
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page(s)
3219-3224
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Identifiers

DOI
10.1557/JMR.1997.0421
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